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This study investigates the efficacy of super-resolution techniques in semiconductor inspection, revealing that while these methods enhance image sharpness, they fail to preserve critical defect evidence necessary for accurate detection. Through a benchmark that differentiates reconstruction quality from detection performance, the authors demonstrate that advanced reconstruction models yield high structural similarity but result in lower defect detection rates compared to simpler methods like bicubic interpolation. Notably, the research highlights that calibration success does not ensure effective transfer to real-world applications, emphasizing the need for a focus on task evidence preservation over mere image quality.
Super-resolution techniques can significantly enhance image quality but may compromise defect detection, with advanced models performing worse than simpler methods in real-world applications.
Super-resolution can make inspection images appear sharper without preserving the evidence needed to detect a defect. We study this failure mode with a benchmark that separates reconstruction from detection and evaluates both at a predeclared low false-positive rate. Ten end-to-end repetitions combine independently generated line/space and contact-hole images with model training, calibration, clean controls, weak defects, and a held-out defect morphology. Every reconstruction is scored by the same local residual detector, while direct and jointly trained detectors form a separate comparison track. Reconstruction fidelity and inspection utility diverge: the two learned reconstruction models attain the highest structural similarity yet detect fewer defect pixels than bicubic interpolation in every paired repetition. A direct DeepLabV3 detector reaches $0.1984\pm0.0385$ recall at $0.000174\pm0.000084$ false-positive rate and satisfies the held-out feasibility criterion in all ten repetitions. An illustrative joint model, DPU-WaferSR, passes independent clean calibration but exceeds the held-out limit in all ten repetitions, demonstrating that calibration success does not guarantee transfer. Weak-defect recall remains near zero for every feasible method. Applying the unchanged policies to 4,591 public Carinthia-S masks further reveals large method-dependent shifts on real SEM texture. These results support a simple conclusion: super-resolution for inspection should be judged by preserved task evidence and operating-point transfer, not reconstruction quality alone.
