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This paper introduces LithoDreamer, a novel physics-informed World Model framework designed to optimize the multi-stage computational lithography process. By formulating the lithography pipeline as a decision-driven multi-step evolution system, LithoDreamer effectively captures the physics of feature changes across stages, enabling interpretable intervention optimization through a contrastive variational optimization paradigm. The framework outperforms existing models in both forward evolution and inverse planning tasks, providing a significant advancement in lithography technology for semiconductor manufacturing.
Achieving state-of-the-art performance in computational lithography, LithoDreamer redefines how we model and optimize complex physical processes.
As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance. However, lithography is a continuous physical process involving mask optimization, optical imaging, resist exposure, and development, which existing models fail to capture. To overcome this limitation, we present LithoDreamer, the first physics-informed World Model (WM) framework for computational lithography, which formulates the ``Layout-Mask-Resist Image-After Development Image (ADI)'' pipeline as a decision-driven multi-step evolution system. LithoDreamer captures feature changes between adjacent states to model stage-specific physics-informed latent spaces, in which it controls process intervention exploration and drives subsequent state transitions. To achieve interpretable intervention optimization without continuous supervision, we propose a contrastive variational optimization paradigm that contrasts the latent differences between intervention paths with variational evolution constraints, guiding the model to generate evolutions consistent with real lithography physics. Experiments show LithoDreamer achieves state-of-the-art performance in forward evolution and inverse planning. Our lithography dataset is publicly available at GitHub (https://github.com/7jiangyq/lithodreamer.git).
