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This study explores the use of commercial capacitive MEMS microphones as air-coupled ultrasonic transmitters, leveraging nonlinear electrostatic actuation to achieve significant diaphragm displacement and ultrasonic pressure generation. A prototype parametric array consisting of 28 dies was tested, successfully producing a directional output at a difference frequency of 10 kHz when driven at 83 and 93 kHz. The findings are validated against analytical radiation theory and finite-element modeling, providing insights into the influence of various design parameters on performance.
A compact MEMS microphone array can generate directional ultrasonic signals, challenging conventional designs in acoustic transmission.
This paper investigates commercial-style capacitive MEMS microphone dies as air-coupled ultrasonic transmitters under nonlinear pull-in and snap-back actuation and demonstrates a compact parametric-array prototype. A single die produces large diaphragm displacement and measurable ultrasonic pressure in air. A 28-die array driven at 83 and 93 kHz generates a directional component at the 10 kHz difference frequency. Measurements are compared with analytical radiation theory and finite-element modeling, and the effects of aperture, fill factor, device uniformity, and receiver nonlinearity are discussed.
