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To overcome severe dynamic range limits between major and minor isotopes in ToF-SIMS, this work implements interleaved-pulse acquisition, a multi-pulse-width measurement scheme calibrated via an in-crater dose factor. Accurately quantifying isotope ratios across wide concentration gradients is critical for tracking mass transport in energy materials without triggering detector saturation or Poisson starvation. The approach extends the quantifiable low-fraction range by approximately 14-fold and matches baseline precision with a 13-fold reduction in acquisition frames across ratios spanning 1:500 to 1:1.
Zero-hardware ToF-SIMS dynamic range expansion is now possible: interleaving tuned pulse widths and scaling by in-crater dose factors delivers a 14-fold range boost and a 13-fold throughput gain for isotopic depth profiling.
Isotope ratios underpin tracer studies of transport in oxides, battery materials, and biological systems, yet time-of-flight secondary ion mass spectrometry (ToF-SIMS) struggles to quantify ratios whose members differ in intensity by orders of magnitude: a primary-ion pulse long enough to count the minor isotope precisely can saturate the major isotope, whereas a pulse short enough to keep the major isotope linear yields too few minor-isotope counts. We show that multi-pulse-width acquisition yields quantitative isotope ratios when a dose factor measured within each crater links the phases and each isotope is taken only from phases in which it remains linear; we call this quantitative reconstruction interleaved-pulse acquisition. Pulse widths are selected from measured transfer curves and peak shapes. On thermal SiO2, a tuned (6, 35) ns pair achieves the same per-layer precision as short-pulse acquisition with a 13-fold reduction in the number of analysis frames. On 18O-enriched WOx films, interleaving extends the quantifiable range at the low-fraction end by about 14-fold. Across isotope ratios spanning approximately 1:500 to 1:1, the interleaved reconstruction agrees with the corresponding linear reference measurements, showing no measurable bias introduced by interleaving, and natural-abundance ratios of oxygen, strontium and titanium are reproduced within several percent. The method requires no hardware additions and enables depth-resolved isotope-ratio measurements over a wide range within a single crater.