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National Academy of Sciences of Ukraine, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine "Igor Sikorsky Kyiv Polytechnic Institute"
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Amorphous $\text{SiO}_x\text{N}_y$ does not remain uniformly mixed under arbitrary synthesis conditions: precise Gibbs energy boundaries dictate exactly when thin films spontaneously phase-separate into distinct oxide and nitride domains.