Track papers across labs, topics, and trends.
Search papers, labs, and topics across Lattice.
This paper introduces a Bayesian framework for analyzing two-dimensional secondary ion mass spectrometry (SIMS) imaging data to improve the localization of trace species on material surfaces. By modeling the underlying distribution of trace species as a superposition of Gaussian peaks and employing a Poisson likelihood to handle low-count measurements, the authors achieve stable inference and uncertainty quantification. The method is validated with synthetic datasets and applied to semiconductor samples, resulting in a significant reduction in localization error for small gold dots from 5.1% to 1.9%.
Accurate submicrometer localization of trace species in SIMS imaging can now be achieved with rigorous uncertainty quantification, transforming how we analyze material surfaces.
To enable accurate localization of trace species on material surfaces, we propose a Bayesian framework for analyzing two-dimensional (2D) secondary ion mass spectrometry (SIMS) imaging data. SIMS is widely used in semiconductor manufacturing, materials science, geology, environmental science, and life sciences because of its high sensitivity and excellent elemental and isotopic specificity. However, precise localization remains challenging because of primary ion beam broadening, overlap between neighboring ion distributions, and limited ion counts. The underlying distribution of trace species is modeled as a superposition of two-dimensional Gaussian peaks. To account for the stochastic nature of low-count measurements, the detected ion counts are assumed to follow a Poisson likelihood within a Bayesian framework. Posterior distributions of the peak parameters are estimated using replica-exchange Monte Carlo (REMC), enabling stable inference together with quantitative uncertainty estimation under low-count conditions. The proposed method is first validated using synthetic datasets with known ground truth and is then applied to SIMS measurements of semiconductor samples containing regularly arranged gold (Au) dots with diameters ranging from 0.4 to 2.0~$μ$m, using scanning electron microscopy (SEM) images as the reference. Optimization of the measurement conditions reduced the relative localization error for 0.4~$μ$m dots from 5.1$\%$ to 1.9$\%$. These results demonstrate accurate submicrometer localization with statistically rigorous uncertainty quantification in 2D SIMS imaging.