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WaferSAGE is introduced as a framework for wafer defect visual question answering using small vision-language models, addressing data scarcity through a three-stage synthesis pipeline guided by structured rubrics. This pipeline uses clustering-based cleaning, vision-language model-generated defect descriptions, and conversion into structured evaluation rubrics to synthesize VQA pairs covering defect characteristics and root cause analysis. The 4B-parameter Qwen3-VL model, trained with curriculum-based reinforcement learning and rubric-aligned rewards, achieves a 6.493 LLM-Judge score, approaching Gemini-3-Flash (7.149), showcasing the potential of small, domain-specific models.
A carefully crafted synthetic data pipeline and rubric-guided RL lets a 4B parameter model nearly match Gemini-3-Flash on wafer defect analysis, suggesting that data quality and targeted training can trump sheer model size.
We present WaferSAGE, a framework for wafer defect visual question answering using small vision-language models. To address data scarcity in semiconductor manufacturing, we propose a three-stage synthesis pipeline incorporating structured rubric generation for precise evaluation. Starting from limited labeled wafer maps, we employ clustering-based cleaning to filter label noise, then generate comprehensive defect descriptions using vision-language models, which are converted into structured evaluation rubrics criteria. These rubrics guide the synthesis of VQA pairs, ensuring coverage across defect type identification, spatial distribution, morphology, and root cause analysis. Our dual assessment framework aligns rule-based metrics with LLM-Judge scores via Bayesian optimization, enabling reliable automated evaluation. Through curriculum-based reinforcement learning with Group Sequence Policy Optimization (GSPO) and rubric-aligned rewards, our 4B-parameter Qwen3-VL model achieves a 6.493 LLM-Judge score, closely approaching Gemini-3-Flash (7.149) while enabling complete on-premise deployment. We demonstrate that small models with domain-specific training can surpass proprietary large models in specialized industrial visual understanding, offering a viable path for privacy-preserving, cost-effective deployment in semiconductor manufacturing.