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This paper introduces a design-oriented methodology for modeling and assessing TSV-induced substrate noise coupling in mixed-signal circuits. A closed-form analytical three-port RLGC macromodel for a Signal-Ground TSV pair is derived, explicitly exposing the substrate node for noise analysis. Applied to a 22nm FD-SOI Ring VCO, the methodology, validated through Spectre RF simulations, demonstrates that TSV aggressors induce significant sideband spurs, with a 1 GHz, 0.5 Vpp aggressor causing a -35.2 dBc spur.
TSVs, the backbone of 3D-ICs, can inject enough substrate noise to create -35dBc spurs in sensitive RF circuits like VCOs.
Through-silicon vias (TSVs) enable dense vertical interconnects in 3D-IC and chiplet systems, but their metal-oxide-silicon structure introduces significant parasitic coupling paths that can degrade the spectral purity of sensitive RF blocks. This paper presents a compact, design-oriented methodology for assessing TSV-induced substrate noise in mixed-signal circuits. We derive a closed-form analytical three-port RLGC macromodel for a Signal-Ground TSV pair that explicitly exposes the substrate node. The methodology is validated using a three-stage Ring VCO designed in a 22 nm FD-SOI technology, where specific RF devices from the process design kit (PDK) provide direct access to the transistor substrate terminals for controlled noise injection. Multi-tone Harmonic Balance simulations in Spectre RF quantify the impact of TSV aggressors on the oscillator's output spectrum. The results indicate that an aggressor of 1 GHz, 0.5 V$_{pp}$ induces a primary sideband spur of -35.2 dBc. Sensitivity characterization reveals that the magnitude of these sideband spurs increases monotonically with the aggressor amplitude. Furthermore, frequency sweeps demonstrate a low-pass coupling response, where the induced spur magnitude decreases from -20.2 dBc at 500 MHz to -33.1 dBc at 2 GHz.